Fabrication of KITWPA

Fabrication of superconducting (TiN) kinetic inductance traveling waveguide parametric amplifier (KITWPA) to enhance qubit readout fidelity. (a) Design of KITWPA. (b) OM image of fabricated KITWPA. (c) Zoom in OM image in (b). (d) SEM image near signal line. (e) KITWPA chip is mounted on a cryo-holder.

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